'Anti' up the aperture [antiguided VCSEL structures]

摘要

Coupled vertical cavity surface-emitting laser (VCSEL) arrays are an attractive means to increase the coherent output power of VCSELs. Single-mode VCSELs, with output powers greater than 10 mW, would be useful as telecommunication transmitters λ=1.3-1.55 μm) or sources for optical interconnects. Commercially available single-mode VCSELs, even at shorter wavelengths λ=0.85 μm), are generally limited to a few milliwatts of output power. The conventional VCSEL structure incorporates a built-in positive-index waveguide, designed to support a single fundamental mode. Promising results in the 3-5 mW range (λ=0.85 μm) have been obtained from wet-oxidized, positive-index-guided VCSELs with small emission apertures (less than 3.5 μm-dia). The small aperture size leads to a high electrical resistance and high current density, which can impact device reliability. By contrast, antiguided VCSEL structures have shown promise for achieving larger aperture single-mode operation. To obtain high single-mode powers with a larger emitting aperture, the use of a negative-index guide (antiguide) is beneficial. This paper discusses antiguided structures and some of their advantages when incorporated in 2-D VCSEL array structures.