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Effects of N_2 and glow discharge on growth behaviours of carbon nanotubes prepared by the hot filament chemical vapour deposition method

机译:N_2和辉光放电对热丝化学气相沉积法制备碳纳米管生长行为的影响

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摘要

Carbon nanotubes (CNTs) are prepared by the hot filament chemical vapour deposition method using CH_4 and H_2 as reaction gases, and the growth behaviours are investigated by scanning electron microscopy and transmission electron microscopy. The results indicate that the CNTs prepared in the absence of N_2 or glow discharge are bent; however, they are in an aligned state after introducing N_2 into the chamber or forming glow discharge under a negative biased voltage. The results also indicate that the CNTs are of a bamboo-like structure when N_2 is intruded as a reaction gas and the alignment degree of the CNTs grown under glow discharge is higher than that grown in N_2. This illustrates that the nitric environment and glow discharge play important roles in the growth of CNTs. Combining with the theory related to alloy thermodynamics and collisions, we have analysed the growth mechanism of the CNTs in nitric environment and glow discharge.
机译:以CH_4和H_2为反应气体,通过热丝化学气相沉积法制备了碳纳米管,并通过扫描电子显微镜和透射电子显微镜研究了其生长行为。结果表明,在没有N_2或辉光放电的情况下制备的CNT发生弯曲。然而,在将N_2引入腔室或在负偏压下形成辉光放电之后,它们处于对准状态。结果还表明,当N_2被引入作为反应气体时,CNT具有竹样结构,并且在辉光放电下生长的CNT的取向度高于在N_2中生长的CNT的取向度。这说明硝酸环境和辉光放电在CNT的生长中起重要作用。结合与合金热力学和碰撞有关的理论,我们分析了碳纳米管在硝酸环境和辉光放电中的生长机理。

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