Combination of loosely and compactly coupled integrations of CAD tools and its applications in SAW devices design and fabrication

摘要

A combination of the loosely and compactly coupled integrations of CAD tools and its applications in the design and fabrication of surface acoustic wave (SAW) devices are proposed in this paper. Three core modules are developed as design and mask pattern verification module, database module, and device characteristics simulation module. All the operations are controlled under Microsoft Windows GUI interface. This leads to a reduced design and fabrication cycle, workload and cost. With the knowledge-based library for intelligent design and Lotus Notes database for distributed and networked engineering database management (EDM) and effective control of documents, a new enterprise-leveled, computer-integrated design and manufacturing system (CIDMS) can be established for monolithic and hybrid device design (not only confined to SAW device).