Combined Processes Yield Oxide Thin Films on Glass Substrate

摘要

Researchers at the Kanaga-wa Academy of Science and Technology (KAST) were able to grow thin film crystals consisting of highly oriented crystal grains, which are as large as few micrometers or more, in the lateral direction. They combined the methods of coating a glass substrate with oxide sheets of about 1nm in thickness called oxide nanosheets, and by using these nanocrystals as seed crystals in solid phase crystallization (SPC). The titanium oxide transparent conductive films fabricated on the glass substrate by this new method exhibited low electrical resistance (3.6 × 10~(-4)Ωcm) and mobility (13cm~2V~(-1)s~(-1)) comparable to thin films grown on a single-crystal substrate. This method has also been confirmed to be applicable to strontium titanate. Thus, it is expected to promote the development of low-cost and high-performance devices using oxide thin film crystals.