Transverse vibrations in micro-scale viscothermoelastic beam resonators

摘要

In this article, the closed form expressions for the transverse vibrations of a homogenous isotropic, thermally conducting, Kelvin-Voigt type viscothermoelastic thin beam, based on Euler- Bernoulli theory have been derived. The effects of relaxation times, thermomechanical coupling, surface conditions, and beam dimensions on energy dissipation induced by thermoelastic damping in MEMS (micro-electromechanical systems) resonators are investigated for beams under clamped and simply supported conditions. Analytical expressions for deflection, temperature change, frequency shifts, and thermoelastic damping in the beam have been derived. Some numerical results with the help of MATLAB programming software in case of Silicon Nitride have also been presented. The computer-simulated results in respect of damping factor and frequency shift have been presented graphically.