Ion Beam Mixing of Sb/Glass Studied by Rutherford Backscattering Spectrometry

摘要

Room temperature ion beam mixing of a Sb/glass system, induced by 300 keV collimated Ar+ ion beams from the Jordan Van de Graff Accelerator, was studied by means of Rutherford backscattering spectrometry (RBS). The RBS spectra of 2.0 MeV He++ ions were collected for the system before, after and at various irradiated doses. The sputtering effect and the kinetics of the atomic mixing were successfully analyzed.