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Study on the anisotropy of the secondary electron yield and resistance of the laser-etched copper

机译:激光蚀刻铜二级电子产量的各向异性研究

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The performance of modern accelerators has been seriously affected by the electron cloud effect (e-cloud) caused by the accumulation of secondary electrons. Such problem can be effectively eliminated by laser-etching the inner surface of the vacuum chambers of the modern accelerators. In this work, surfaces of oxygen-free copper (OFC) were laser etched following either parallel lines or square-grid pattern with different scanning speeds. The secondary electron yields (SEYs), resistance, and roughness of the etched OFC samples were measured from various directions. The surfaces of etched OFC samples have been proven to form some regularly arranged grooves or cones, the geometries of which are directly related to the etching parameters. As a result, the parallelly etched samples exhibit apparent anisotropy. The sample etched along parallel lines, present higher SEYs, resistance and roughness when measured in the direction perpendicular to the groove-lines. But the sample etched following square-grid have little difference in the two directions and have a lower SEY value than the parallelly etched samples. Moreover, low-speed etching is more favorable to producing large aspect ratio and porosity structures, which is conducive to obtain lower SEY values.
机译:现代加速器的性能受到由二次电子积累引起的电子云效应(E-Cloud)的严重影响。通过激光蚀刻现代加速器的真空腔室的内表面可以有效地消除这种问题。在这项工作中,在具有不同扫描速度的平行线或方形网格图案之后激光蚀刻无氧铜(OFC)的表面。蚀刻OFC样品的二次电子产率(SEYS),电阻和粗糙度从各个方向测量。已经证明了蚀刻的OFC样品的表面以形成一些规则布置的凹槽或锥体,其几何形状与蚀刻参数直接相关。结果,并行蚀刻样品表现出明显的各向异性。沿着平行线蚀刻的样品,当在垂直于凹槽线的方向上测量时,呈现更高的SEYS,电阻和粗糙度。但是,在方形栅格之后蚀刻的样品在两个方向上差异很小,并且具有比平行蚀刻的样品更低的SEY值。此外,低速蚀刻更有利于产生大的纵横比和孔隙率结构,这有利于获得更低的SEY值。

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