Electrical characteristics of UV photodetectors based on ZnO/diamond film structure

摘要

Ultraviolet photodetectors based on ZnO diamond film structure were fabricated. The properties of Au/ZnO contacts and effects of grain sizes on the electrical characteristics of photodetectors were discussed. Due to the bombardment with Au atoms and the annealing process, fine ohmic contacts were formed between Au electrodes and ZnO films. Dark currents and photocurrents of the photodetectors were related to sputtering time and the grain size of ZnO films. For the photodetector with a bigger grain size, a lower dark current and a higher photocurrent were obtained under 10 V bias voltage. The time-dependent photocurrent confirmed the carrier trapping effect.