Transparent conducting molybdenum-doped zinc oxide films deposited by RF magnetron sputtering

摘要

A new transparent conducting oxide (TCO) film with low resistivity and high transmittance in the visible range, molybdenum-doped zinc oxide (MZO), was successfully prepared by RF magnetron sputtering method on glass substrates at room temperature. The structural, electrical, and optical properties as a function of film thickness were investigated. All the samples have a preferred orientation with the (0 0 2) planes parallel to the substrates. The resistivity initially decreases and then shows an increase with the increase of the film thickness. When the thickness is 400 nm, the film has its best crystallinity and lowest resistivity 9.2 × 10~(-4) Ω cm with a Hall mobility of 30 cm~2 V~(-1) s~(-1) and a carrier concentration of 2.3 × 10~(20) cm~(-3). The average transmittance in the visible range exceeds 84% for all thickness films.