Properties Of Nio Thin Films Deposited By Chemical Spray Pyrolysis Using Different Precursor Solutions

摘要

NiO thin films have been deposited by chemical spray pyrolysis using a perfume atomizer to grow the aerosol. The influence of the precursor, nickel chloride hexahydrate (NiCl_2·6H_20), nickel nitrate hexahydrate (Ni(NO_3)_2·6H_2O), nickel hydroxide hexahydrate (Ni(OH)_2·6H_2O), nickel sulfate tetrahydrate (NiSO_4·4H_2O), on the thin films properties has been studied. In the experimental conditions used (substrate temperature 350 ℃, precursor concentration 0.2-0.3 M, etc.), pure NiO thin films crystallized in the cubic phase can be achieved only with NiCl_2 and Ni(NO_3)_2 precursors. These films have been post-annealed at 425 ℃ for 3 h either in room atmosphere or under vacuum. If all the films are p-type, it is shown that the NiO films conductivity and optical transmittance depend on annealing process. The properties of the NiO thin films annealed under room atmosphere are not significantly modified, which is attributed to the fact that the temperature and the environment of this annealing is not very different from the experimental conditions during spray deposition. The annealing under vacuum is more efficient. This annealing being proceeded in a vacuum no better than 10~(-2) Pa, it is supposed that the modifications of the NiO thin film properties, mainly the conductivity and optical transmission, are related to some interaction between residual oxygen and the films.