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Influence Of Un-cured Pdms Chains In Stamp Using Pdms-based Lithography

机译:基于Pdms的光刻技术对未固化Pdms链在印章中的影响

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We present the compatibility of elastomeric stamp, poly(dimethylsiloxane) (PDMS), with inks for non-photolithography. This ink limitation is important in considering the lamination of hydrophilic solution on the patterned ink surface using an elastomeric stamp. We focus on an increase of the hydrophobicity of the patterned surface due to diffusion of low molecular weight (LMW) silicone polymer chains. This hydrophobicity increases inversely with the PDMS-ink interaction parameter (χ), which is correlated with the solubility parameter (δ). This study's results translate into proposed design factors for ink used in the patterned functional layer for PDMS-based lithography. Both the XPS and the contact angle measurement show that the hydrophobicity can be increased by LMW PDMS chains transfer from stamps, and this increase can cause the expansion of the free volume in PDMS pores through a swelling effect.
机译:我们介绍了弹性印章,聚二甲基硅氧烷(PDMS)与非光刻油墨的相容性。在考虑使用弹性体印模将亲水性溶液层压在图案化的油墨表面上时,该油墨限制很重要。我们专注于由于低分子量(LMW)硅氧烷聚合物链的扩散而导致的图案化表面疏水性的增加。该疏水性与PDMS-墨水相互作用参数(χ)成反比,该参数与溶解度参数(δ)相关。这项研究的结果转化为用于基于PDMS的光刻的图案化功能层中使用的墨水的建议设计因素。 XPS和接触角测量均表明,LMW PDMS链从印模转移可增加疏水性,而这种增加可通过溶胀作用导致PDMS孔中自由体积的膨胀。

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