Fiber laser annealing of nanocrystalline PZT thick film prepared by aerosol deposition

摘要

Nanocrystalline PZT thick films (1 mm square and over 10 μm thick) directly deposited onto stainless-steel substrates (PZT/SUS) by aerosol deposition (AD) technique and then annealed using focused laser beam with a fiber laser to suppress thermal damage to the back sides of the PZT/SUS and substrate near the film edge and to retain the dielectric and/or ferroelectric properties of the PZT/SUS. Compared with CO_2 laser annealing, fiber laser annealing suppressed thermal damage to the substrate. Compared with PZT/SUS annealed at 600 ℃ using an electric furnace, PZT/SUS annealed at 600 ℃ using a fiber laser showed superior properties, namely, dielectric constant e > 1200 at a frequency of 100 Hz, remanent polarization P_r > 30 μC/cm~2, and coercive field strength E_c<50kV/cm at a frequency of 10 Hz. Furthermore, the grain growth for the PZT/SUS formed by AD technique and annealed by fiber laser irradiation was occurred within the laser spot size.