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Plasmonic Structure Generation By Laser Illumination Of Silica Colloid Spheres Deposited Onto Prepatterned Polymer-bimetal Films

机译:通过激光照射沉积在预形成图案的聚合物-双金属薄膜上的硅胶胶体球产生等离子体结构

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摘要

Plasmonic structures are prepared on bimetal films evaporated onto glass substrates applying a multi-step process, and atomic force microscopy is utilized to study the structures after each step. Sub-micrometer gratings are generated on polycarbonate films spin-coated onto silver-gold bimetal layers by interference lithography (IL) applying the fourth harmonics of a Nd:YAG laser. These polymer gratings are used as prepatterned templates in order to deposit silica colloid spheres by spin-coating. It is shown that the conditions of periodic silica sphere-array formation along the template valleys are sufficiently large grating modulation depth, appropriate ratio of silica sphere diameter to grating period, and optimized speed of spinning. The periodic silica sphere arrays are illuminated by a homogeneous KrF excimer laser beam, and periodically arrayed sub-wavelength holes are drilled into bimetal films via colloid sphere lithography (CSL). The characteristic dimensions of the resulted plasmonic structures are defined by the polymer grating period and by the silica colloid sphere diameter. Attenuated total reflection spectroscopy is performed exciting plasmons on different metal-dielectric interfacial structures by the second harmonic of a continuous Nd: YAG laser. The polar and azimuthal angle dependent grating-coupling and scattering effects of the complex periodic structures on the resonance characteristic of plasmons is demonstrated.
机译:采用多步骤工艺在蒸发到玻璃基板上的双金属薄膜上制备等离子体结构,并在每个步骤之后利用原子力显微镜研究结构。通过使用Nd:YAG激光的四次谐波的干涉光刻(IL)在旋涂到银金双金属层上的聚碳酸酯薄膜上生成亚微米光栅。这些聚合物光栅用作预模板,以便通过旋涂沉积二氧化硅胶体球。结果表明,沿着模板谷周期性形成二氧化硅球阵列的条件是足够大的光栅调制深度,适当的二氧化硅球直径与光栅周期的比以及最佳的纺丝速度。周期性的二氧化硅球阵列由均匀的KrF准分子激光束照射,并通过胶体球体光刻(CSL)在双金属膜上钻出周期性排列的亚波长孔。所得等离激元结构的特征尺寸由聚合物光栅周期和二氧化硅胶体球直径定义。衰减全反射光谱法是通过连续Nd:YAG激光的二次谐波在不同的金属-介电界面结构上激发激子。证明了极性和方位角对复杂周期结构的光栅耦合和散射对等离子体激元共振特性的影响。

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