Characterization and properties of ZnO_(1-x)S_x alloy films fabricated by radio-frequency magnetron sputtering

摘要

A series of ZnO_(1-x)S_x alloy films (0≤x≤1) were grown on quartz substrates by radio-frequency (rf) magnetron sputtering of ZnS ceramic target, using oxygen and argon as working gas. X-ray diffraction measurement shows that the ZnO_(1-x)S_x films have wurtzite structure with (002) preferential orientation in O-rich side (0≤x≤0.23) and zinc blende structure with (111) preferential orientation in S-rich side (0.77≤x ≤1). However, when the S content is in the range of 0.23