机译:尺寸可控的单分散聚苯乙烯/二氧化硅核壳纳米复合磨料的制备及其对铜的化学机械抛光性能
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China,Shanghai Xinanna Electronic Technology Co., Ltd., Shanghai 201506, China,Graduate School of the Chinese Academy of Sciences, Beijing 100049, China;
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China,Shanghai Xinanna Electronic Technology Co., Ltd., Shanghai 201506, China,Graduate School of the Chinese Academy of Sciences, Beijing 100049, China;
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China,Shanghai Xinanna Electronic Technology Co., Ltd., Shanghai 201506, China,Graduate School of the Chinese Academy of Sciences, Beijing 100049, China;
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China,Shanghai Xinanna Electronic Technology Co., Ltd., Shanghai 201506, China;
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China,Shanghai Xinanna Electronic Technology Co., Ltd., Shanghai 201506, China;
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China,Shanghai Xinanna Electronic Technology Co., Ltd., Shanghai 201506, China;
PS/SiO_2; core-shell; nano-composite abrasive; copper; chemical mechanical polishing;
机译:钛掺杂单分散胶体SiO2复合磨料的制备及其在蓝宝石基底上的化学机械抛光性能
机译:化学机械抛光中单分散二氧化硅胶体磨料可控生长的研究
机译:核/壳结构聚苯乙烯/二氧化铈杂化磨料的铜化学机械抛光性能
机译:纳米二氧化硅磨料在铜化学机械抛光中的作用
机译:用于化学机械抛光的二氧化硅和二氧化铈纳米颗粒混合磨料浆料的胶体稳定性研究。
机译:纳米纤维素衍生物/二氧化硅混合核-壳手性固定相:制备和对映体分离性能
机译:Ag2O改性二氧化硅磨料的制备及其在蓝宝石上的化学机械抛光性能