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首页> 外文期刊>Applied Surface Science >Optimization of surface morphology and scattering properties of TCO/AIT textured glass front electrode for thin film solar cells
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Optimization of surface morphology and scattering properties of TCO/AIT textured glass front electrode for thin film solar cells

机译:TCO / AIT薄膜太阳能电池用TCO / AIT纹理玻璃前电极的表面形态和散射特性的优化

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Aluminium induced texture (AIT) method has been used for obtaining highly textured glass substrate suitable for silicon based thin film solar cell technology. Wet etch step parameters of AIT process have been varied and effect of different etchants and different etching times on morphological and optical properties has been analyzed. The resulting morphology features (shape, size distribution, inclination angle) have been optimized in order to obtain the best scattering properties. ZnO:Ga (GZO) films have been deposited by sputtering technique on AIT-processed glass. Two different ZnO surface morphologies have been obtained, strongly depending on the underlying glass substrate morphology induced by different etching times. Very rough and porous texture (arms 150 nm) was obtained on glass etched 2 min showing cauliflower-like structure, whereas a softer texture (arms 78 nm) was obtained on glass etched 7 min giving wider and smoother U-shaped craters. The effect of different glass textures on optical confinement has been tested in amorphous silicon based p-i-n devices. Devices fabricated on GZO/high textured glass showed a quantum efficiency enhancement due to both an effective light trapping phenomenon and an effective anti-reflective optical behaviour. Short etching time produce smaller cavities (<1 mu m) with deep U-shape characterized by high roughness, high inclination angle and low autocorrelation length. This surface morphology promoted a large light scattering phenomenon, as evidenced by haze value and by angular resolved scattering (ARS) behaviour, into a large range of diffraction angles, giving high probability of effective light trapping inside a PV device. (C) 2015 Elsevier B.V. All rights reserved.
机译:铝诱导织构(AIT)方法已用于获得适用于硅基薄膜太阳能电池技术的高织构玻璃基板。改变了AIT工艺的湿蚀刻步骤参数,并分析了不同蚀刻剂和不同蚀刻时间对形态和光学性能的影响。为了获得最佳散射性能,已对所得的形态特征(形状,尺寸分布,倾斜角度)进行了优化。 ZnO:Ga(GZO)膜已通过溅射技术沉积在AIT处理的玻璃上。已经获得了两种不同的ZnO表面形态,这在很大程度上取决于由不同蚀刻时间引起的底层玻璃基板形态。在刻蚀了2分钟的玻璃上获得了非常粗糙和多孔的纹理(臂为150 nm),显示出菜花状结构,而在刻蚀了7分钟的玻璃上获得了较软的纹理(臂78 nm),从而得到了更宽且更平滑的U形凹坑。已经在基于非晶硅的p-i-n器件中测试了不同玻璃质地对光学限制的影响。由于有效的光捕获现象和有效的抗反射光学性能,在GZO /高纹理玻璃上制造的器件显示出量子效率的提高。较短的蚀刻时间可产生较小的腔体(<1微米),具有深的U形形状,具有高粗糙度,高倾斜角和低自相关长度的特点。这种表面形态促进了大的光散射现象,如雾度值和角分辨散射(ARS)行为所证明的那样,该现象在很大的衍射角范围内,从而使有效的光捕获在PV器件内部的可能性很高。 (C)2015 Elsevier B.V.保留所有权利。

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