Microstructure, mechanical and tribological properties of CrSiC coatings sliding against SiC and Al2O3 balls in water

摘要

CrSiC coatings with different silicon contents were prepared using unbalanced magnetron sputtering via adjusting trimethylsilane (Si(CH3)(3)H) flows. Their phase structure, bonding structure, microstructure and hardness were characterized by X-ray diffraction (XRD), X-ray photoelectrons spectroscopy (XPS), a field emission scanning electron microscope (FESEM) and nano-indenter, respectively. The tribological properties of CrSiC coatings sliding against SiC and Al2O3 balls were investigated in water. The results showed that the CrSiC coatings were speculated to be X-ray amorphous. Although the hardness of coatings fluctuated slightly (13.2-13.8 GPa), the coatings showed poor wear resistance due to the decline of the crack resistance and toughness. Moreover, the friction coefficient (0.24-0.31) and the wear rate (2.97-7.66 x 10(-6) mm(3)/Nm) of CrSiC/SiC trobopairs were lower than those of CrSiC/Al2O3 tribopairs. (C) 2016 Elsevier B.V. All rights reserved.