机译:以四烷基二甲基氨基钒(IV)为钒前驱体的VO2膜的原子层沉积
Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Coating Mat CAS, Shanghai 201800, Peoples R China|Univ Chinese Acad Sci, Beijing 100049, Peoples R China;
Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Coating Mat CAS, Shanghai 201800, Peoples R China;
Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Coating Mat CAS, Shanghai 201800, Peoples R China;
Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Coating Mat CAS, Shanghai 201800, Peoples R China;
Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Coating Mat CAS, Shanghai 201800, Peoples R China;
Atomic layer deposition; Vanadium precursor; Vanadium dioxide; Thin films; Metal-insulator transition;
机译:多尺度模拟研究原子层沉积过程中VO2薄膜生长用钒前驱体
机译:四(二甲基氨基)钒前体的钒氧化物薄膜的原子层沉积
机译:用原子层沉积和后置换退火的多价钒氧化物薄膜(V2O5和VO2)的容易相位控制
机译:原子层沉积预处理的多壁碳纳米管及钒氧化物沉积的表征(ALD)
机译:金属膜的原子层沉积:从前驱物合成到膜沉积
机译:二氧化钒的原子层沉积和与温度有关的光学模型
机译:来自四(二甲基氨基)钒前体的氧化钒薄膜的原子层沉积