The effect of substrate vicinal offcut on the morphology and physical properties of YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// thin films

摘要

In this work we present a simple and reliable new method for producing YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// thin films with an exceptionally high J/sub c/ value, one order of magnitude higher than the value usually reported for this phase and a low surface roughness/spl sim/1 nm. Using SrTiO/sub 3/ substrates polished at low angles off the [001] towards the [010] plane provides control over both the physical properties and surface roughness of the films grown, with the 1.7/spl deg/ misorientation angle leading to films with the best properties.