High quality SmBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// thin films on SrTiO/sub 3/ (100) substrates deposited by pulsed electron beam deposition

摘要

We for the first time report a successful fabrication of a high-J/sub C/ SmBa/sub 2/Cu/sub 3/O/sub 7-/spl delta//(SmBCO) thin film (/spl sim/240 nm thickness) on SrTiO/sub 3/ (100) substrate by the pulsed electron beam deposition (PED) process. For this study, we systematically investigated the effect of processing parameters, including substrate temperature (Ts), ambient oxygen pressure (PO/sub 2/), and target-to-substrate distance, on superconducting properties, including critical temperature (T/sub C/) and critical current density (J/sub C/), of PED-processed SmBCO films. The highest J/sub C/ value of 1.37 MA/cm/sup 2/ at 77 K in self field was obtained from an optimally processed sample using Ts of 900/spl deg/C (corresponding to real substrate temperature of 810/spl deg/C), PO/sub 2/ of 15 mTorr, and target-to-substrate distance of 9 cm, evidencing that this process is a potential alternative to the PLD process.