Excimer laser-induced microbumps on preheated BK7-glass

摘要

Microbumps on BK7-glass are made by nanosecond KrF-excimer laser irradiation. Bumps with heights in the micrometer-range and a diameter of about 20 μm are re-producibly obtained in the case of a preheated glass substrate. Preheating and laser-induced local heating act together to exceed the glass transition temperature on a volume forming a bump due to the action of surface tension. This process may open up a route to the rapid fabrication of microlens arrays.