Non-contact subsurface temperature measurements following mid-infrared laser irradiation

摘要

A difficult challenge in laser processing at nanosecond time scales is monitoring substrate temperature in the laser focal volume, particularly for mid-infrared laser irradiation where the absorption depth is relatively large and the attained temperatures are often relatively low. Here, we describe time-dependent measurements of the subsurface temperature of a target material following absorption of pulsed mid-infrared (MIR) laser irradiation, by detecting the luminescence from micron-size ceramic phosphor particles (Gd-doped YAG:Ce) embedded in the target material at a concentration of up to 10 %. Temperature calibrations were obtained by measuring the luminescence decay of the probe particles in an oil-bath heater. A silica-nanoparticle film was irradiated by an Er:YAG laser operating in a free-running mode over a fluence range up to but below the ablation threshold, while the third harmonic of the Nd:YAG laser excited the luminescence of the probe particles. From the temperature calibrations, it was possible to infer the thermal history of the target as a function of time delay between the Er:YAG and Nd:YAG laser pulses.