Effect of surrounding gas condition on surface integrity in micro-drilling of SiC by ns pulsed laser

摘要

The influence of the surrounding gas conditions on the surface integrity in the micro-drilling of silicon carbide was experimentally investigated using ns pulsed laser of 266 nm wavelength. Moreover, micro-machining characteristics were observed using high-speed shutter and video cameras in the micro-drilling of silicon carbide. The size and intensity of the laser-induced plasma were larger, and the plasma affected area was larger and deeper in argon than that in air. Although the intensity of the plasma was lower in helium than that in other gases, the surface around the drilled hole was roughened by the spread of the plasma in the vicinity of the drilled hole. Debris was removed along the flow field generated by laser shot in the opposite direction to the laser irradiation. The gas flow behavior and the spectrum and intensity of the laser-induced plasma were influenced by the surrounding gas type and pressure. The appearance of plasma generation affected the surface integrity at the circumference of the drilled hole, and the surface integrity was improved by reducing the pressure.