Resolving the EH_6/7 level in 4H-SiC by Laplace-transform deep level transient spectroscopy

摘要

We show that Laplace transform deep level transient spectroscopy (LDLTS) is an effective technique for the separation of the overlapping emission rates of the EH₆ and EH₇ levels, which are known to constitute EH_6/7, a mid-gap level in n-type 4H-SiC. The analysis of the electron irradiation dose, electric field dependence, and the effects of carbon interstitials injection on the emission rates of EH₆ and EH₇ shows that EH₇ is dominant over EH₆ and confirms that their nature is related to a carbon vacancy.