Energy loss near-edge structure for materials containing light elements by reflection electron energy loss spectroscopy

摘要

A reflection electron energy loss spectroscopy system has been developed to investigate local surface atomic structures around light elements such as C, N, and O. Electrons scattered inelastically on a surface with a small scattering angle are energy analyzed. This system was used to measure energy loss near-edge structures (ELNESs) for materials such as BN, graphite, and NiO. The comparison between ELNES and x-ray absorption near edge structure suggests that the ELNES is useful for the atomic structure analyses of surfaces.