Patterned nanoclusters in the indium-doped SrTiO3 films

摘要

Highly dense, dimensionally uniform, and self-organized nanoclusters have been formed in the indium-doped SrTiO3 film, which was grown by computer-controlled laser molecular-beam epitaxy on SrTiO3 substrate. On the basis of transmission electron microscopy and three-dimensional strain mapping from a high-resolution lattice image, it is found that the nanoclusters exhibit a dome-shaped structure with a flat bottom, whose diameter distribution ranges from 1.6 nm to 6.4 nm. Nanobeam composition analysis shows that the nanoclusters are rich of doping element compared with their surrounding medium. (C) 2004 American Institute of Physics.