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L1_0 FePt films deposited on pyramid-type Si substrate for perpendicular magnetic recording media

机译:在金字塔型Si衬底上沉积用于垂直磁记录介质的L1_0 FePt膜

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摘要

Tetragonal L1_0 FePt films are deposited on the pyramid-type Si substrates fabricated by chemical etching process from (100) Si wafers. The films are composed of different easy-axis orientation FePt grains, most of which with the easy axis along substrate normal, the others with the easy axis tilted from the normal direction. When the magnetic field is applied along the perpendicular direction, the easy-axis tilted grains reverse first, and then the magnetization reversal of the whole film is promoted. Small coercivity, suitable α, and high squareness are obtained. And the coercivity increases when the applied field is tilted from the normal direction.
机译:将四边形的L1_0 FePt膜沉积在由(100)硅晶片通过化学蚀刻工艺制成的金字塔型Si衬底上。薄膜由不同的易轴取向FePt晶粒组成,大多数晶粒的易轴方向都垂直于基底法线,而其他薄膜的易轴方向均从法线方向倾斜。当沿垂直方向施加磁场时,易轴倾斜晶粒先反转,然后促进整个薄膜的磁化反转。获得了小的矫顽力,合适的α和高矩形度。当施加的磁场从法线方向倾斜时,矫顽力增加。

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