Silicon nanomechanical resonators with a double-triangle cross section leading to an enhanced mass sensitivity

摘要

We report on a silicon nanomechanical resonator fabricated with a double-triangle cross section, leading to an enhanced mass sensing capabilities. We analytically derive the dependence of the mass detection limit on, respectively, the moment of inertia and the cross section of a beam resonator. We conclude that our scaling compatible fabrication scheme can yield an enhancement of as much as 2.3 with regard to regular, rectangular resonators of the same size. We experimentally confirm the shape dependence of the resonant frequency and maximum drive energy, supporting our model for the mass detection limit.