Use of bias sputtering to enhance decoupling in oxide composite perpendicular recording media

摘要

The effects of substrate bias on two types of oxide composite perpendicular recording media CoCrPt-SiO_2 and FePt-MgO were investigated. The use of substrate bias greatly modified the thin film microstructure and resulted in the enhanced grain decoupling in the films. The growth characteristics due to preferential resputtering were interpreted to arise mainly from weak surface bonding to the growing films for nontextured growth, combined with strong cohesion for the textured growth.