Biomimetic broadband antireflection gratings on solar-grade multicrystalline silicon wafers

摘要

We report a simple and scalable bottom-up technique for fabricating broadband antireflection gratings on solar-grade multicrystalline silicon (mc-Si) wafers. A Langmuir-Blodgett process is developed to assemble close-packed silica microspheres on rough mc-Si substrates. Subwavelength moth-eye pillars can then be patterned on mc-Si by using the silica microspheres as structural template. Hemispherical reflectance measurements show that the resulting mc-Si gratings exhibit near zero reflection for a wide range of wavelengths. Both experimental results and theoretical prediction using a rigorous coupled-wave analysis model show that close-packed moth-eye arrays exhibit better antireflection performance than non-close-packed arrays due to a smoother refractive index gradient.