Demonstration of low-loss on-chip integrated plasmonic waveguide based on simple fabrication steps on silicon-on-insulator platform

摘要

We report the experimental realization of a robust silicon-based plasmonic waveguide structure which can theoretically provide sub-wavelength confinement for E_x- and E_y-polarized surface plasmon polariton modes. Our waveguides exhibit propagation loss as low as 0.2 dB/μm with ～50% coupling efficiency.