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Planar superconducting resonators with internal quality factors above one million

机译：内部品质因数超过一百万的平面超导谐振器

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摘要

We describe the fabrication and measurement of microwave coplanar waveguide resonators with internal quality factors above 10~7 at high microwave powers and over 10~6 at low powers, with the best low power results approaching 2 × 10~6, corresponding to ～1 photon in the resonator. These quality factors are achieved by controllably producing very smooth and clean interfaces between the resonators' aluminum metallization and the underlying single crystal sapphire substrate. Additionally, we describe a method for analyzing the resonator microwave response, with which we can directly determine the internal quality factor and frequency of a resonator embedded in an imperfect measurement circuit.
机译：我们描述了微波共面波导谐振器的制造和测量，该微波共面波导谐振器在高功率时的内部品质因数高于10〜7，在低功率时的内部品质因数超过10〜6，最佳低功率结果接近2×10〜6，相当于〜1个光子在谐振器中。通过可控地在谐振器的铝金属化层和下面的单晶蓝宝石衬底之间产生非常光滑和干净的界面，可以达到这些质量因素。此外，我们描述了一种分析谐振器微波响应的方法，通过该方法，我们可以直接确定嵌入到不完美测量电路中的谐振器的内部品质因数和频率。

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  • 来源
    《Applied Physics Letters》 |2012年第11期|p.113510.1-113510.4|共4页
  • 作者

    A. Megrant; C. Neill; R. Barends; B. Chiaro; Yu Chen; L. Feigl; J. Kelly; Erik Lucero; Matteo Mariantoni; P. J. J. OMalley; D. Sank; A. Vainsencher; J. Wenner; T. C. White; Y. Yin; J. Zhao; C. J. Palmstr?m; John M. Martinis; A. N. Cleland;

  • 作者单位

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA,Department of Materials, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Materials, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA,California NanoSystems Institute, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Materials, University of California, Santa Barbara, California 93106-9530, USA,Department of Electrical and Computer Engineering, University of California, Santa Barbara,California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA,California NanoSystems Institute, University of California, Santa Barbara, California 93106-9530, USA;

    Department of Physics, University of California, Santa Barbara, California 93106-9530, USA,California NanoSystems Institute, University of California, Santa Barbara, California 93106-9530, USA;

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  • 入库时间 2022-08-18 03:17:08

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