Altering the sulfur content in the propanethiol plasma polymers using the capacitive-to-inductive mode transition in inductively coupled plasma discharge

摘要

The effect of the transition from capacitive (E) to inductive (H) mode on propanethiol plasma polymer films properties was investigated by optical emission as well as by x-ray photoelectron spectroscopy. The E mode is characterized by low deposition rate and by high sulfur content in the films (～40% vs ～20% in H mode). After aging, a strong decrease of sulfur to carbon content (from ～0.75 to 0.13), attributed to desorption of unbounded sulfur-based molecules (e.g., H_2S), is detected at low power in E mode. The importance of the E-H transition for altering the film properties is highlighted.10.