Development of tilted hexagonal platelet ZnO using atmospheric pressure chemical vapor deposition and investigation of its growth mechanism

摘要

Large area ZnO films (25 x 25 cm~2) grown via atmospheric pressure chemical vapor deposition (APCVD) showed unique surface morphologies of tilted hexagonal platelets. In response to the tilt angle change from 50° to 75°, haze values increased from 7% to 25%, indicating that tilt angles directly affected the light-trapping capabilities of films. These unique surfaces were created when H_2O oxidizers were used, while powder-like ZnO formed when 0_2 or 0_3 oxidizers were used. Based on experimental results, corresponding density function theory, and thermodynamic calculations, the initial growth and property of APCVD for ZnO on glass were elucidated.