Large-area, broadband and high-efficiency near-infrared linear polarization manipulating metasurface fabricated by orthogonal interference lithography

摘要

Manipulation of the polarization state using electromagnetic metasurface has attracted considerable attention in recent years. However, most previously demonstrated single-layer polarization conversion metasurfaces suffer from low polarization conversion efficiency, narrow operation bandwidth, or huge fabrication challenges, especially for the visible and near-infrared frequencies. In this letter, a broadband and high-efficiency reflective linear polarization converter composed of ellipse-shaped plasmonic planar resonator was demonstrated in the near-infrared region. A polarization conversion ratio in power larger than 91.1% is achieved from 730 nm to 1870 nm. Furthermore, orthogonal interference lithography is adopted to prepare the large-area optical polarization conversion metasurface. The fabrication strategy unplugs the bottleneck of the fabrication of the large-area metasurface in the optical regime, promising an unprecedented progress for optical communication and integrated optics.