Self aligned hysteresis free carbon nanotube field-effect transistors

摘要

Hysteresis phenomenon in the transfer characteristics of carbon nanotube field effect transistor (CNT FET) is being considered as the main obstacle for successful realization of electronic devices based on CNTs. In this study, we prepare four kinds of CNTFETs and explore their hysteretic behavior. Two kinds of devices comprise on-surface CNTs (type Ⅰ) and suspended CNTs (type Ⅱ) with thin insulating layer underneath and a single global gate which modulates the CNT conductance. The third and fourth types (types Ⅲ and Ⅳ) consist of suspended CNT over a metallic local gate underneath, where for type Ⅳ the local gate was patterned self aligned with the source and drain electrodes. The first two types of devices, i.e., type Ⅰ and Ⅱ, exhibit substantial hysteresis which increases with scanning range and sweeping time. Under high vacuum conditions and moderate electric fields (|E| ＞ 4 × 10~6 V/cm), the hysteresis for on-surface devices cannot be eliminated, as opposed to suspended devices. Interestingly, type Ⅳ devices exhibit no hysteresis at all at ambient conditions, and from the different roles which the global and local gates play for the four types of devices, we could learn about the hysteresis mechanism of this system. We believe that these self aligned hysteresis free FETs will enable the realization of different electronic devices and sensors based on CNTs.