A Lorentz force magnetometer based on a piezoelectric-on-silicon square-extensional mode micromechanical resonator

摘要

In this letter, we present a Lorentz force magnetic field sensor based on a thin-film piezoelectric-on-silicon (TPoS) CMOS-compatible resonator for the detection of an out-of-plane (perpendicular to the plane of fabrication) magnetic field. We here exploit the fundamental breathing mode of vibration in a suspended square plate, which is commonly referred to as the square-extensional (SE) mode. The symmetric stress profile of the SE mode avails stresses in the two orthogonal in-plane axes to be effectively coupled into a charge output through the piezoelectric transducers. This in turn enhances the output motional current from the device, which effectively determines the responsivity of the device. In this context, the responsivity has been defined as a ratio of output motional current to the external magnetic field, which has been further normalized against the input reference current of the device. The reported device has recorded a responsivity of 6950ppm/T (μA/A.T) at a resonant frequency of 5.28 MHz and a reasonable mechanical quality (Q) factor of 1056 in air.