Multi-object investigation using two-wavelength phase-shift interferometry guided by an optical frequency comb

摘要

Two-wavelength phase-shift interferometry guided by optical frequency combs is presented. We demonstrate the operation of the setup with a large step sample simultaneously with a resolution test target with a negative pattern. The technique can investigate multi-objects simultaneously with high precision. Using this technique, several important applications in metrology that require high speed and precision are demonstrated. Published by AIP Publishing.