Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry

摘要

Discrepancies between phase-shifting and white-light interferometry have been observed in step-height and sur. face rodghness measurements. The discrepancies have a strong relation to the roughness average parameter of the surface. The skewing effect, which mainly occurs in the vicinity of peaks, valleys, and edges of the sample, catiges this problem in white-light interferometry of step height. For roughness, two possible sources of the discrepancy are considered.