Polymer derived ceramics in MEMS/NEMS - a review on production processes and application

摘要

The availability of micro- and nanoelectromechanical systems (MEMS/NEMS) made from nonoxide ceramics containing the elements Si, C, N and B opens up new areas of applications in various branches of technology. Using polymer derived ceramics (PDC) the application of MEMS/NEMS in harsh environments with a high temperature under oxidising conditions becomes possible. Smallest features below one micron have already been realised. Two main approaches to the fabrication of PDC containing MEMS/NEMS are presented in this review. In so called nanoimprint lithography or soft lithography methods the microstructures are initially prepared on a duroplastic master for derivative moulding or printing processes. A direct method is the structuring and cross linking of preceramic polymers using lithographic energy sources like ultraviolet, X-ray, electron beam and laser.