Air-Bridged Ohmic Contact on Vertically Aligned Si Nanowire Arrays: Application to Molecule Sensors

摘要

For the last few years, nanowires have attracted enormous attention due to fundamental scientific importance and also to promising technological potential. Vertically aligned nanowires over an extended area have been considered as ideal platform for developing the advanced devices for energy harvesting and storage, molecule sensing, and information storage, because vertical configuration of nanowires offers distinct merits over lateral one in terms of the utilization of surface area and the integration density of individual active nano-components (i.e., nanowires). However, to date, the commercialization of such devices has been very limited due to the difficulties involved in integration of vertical nanowires into electrically conducting parts over technologically relevant scale.