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Editorial for the Special Issue on Miniaturized Silicon Photodetectors: New Perspectives and Applications

机译:编辑为小型化硅光电探测器的特殊问题:新的视角和应用

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摘要

Silicon (Si) technologies provide an excellent platform for monolithically integrating both photonic [1] and microelectronic [2] functionalities in the same substrate. In the last few years, a variety of passive and active Si photonic and optoelectronic devices have been reported, in particular in the field of photodetection [3,4,5] where new effects and structures have been proposed. Si photodetectors (PDs) at visible wavelengths are a commercial reality, but, unfortunately, they cannot be employed in the infrared (IR) range due the Si transparence over 1100 nm. Historically, the use of germanium (Ge) grown on Si has allowed for the realization of Si-based PDs up to 1550 nm [6]. In recent years, impressive progresses have been achieved by extending the operation of Si PDs to the infrared regime and, recently, thanks to the investigation of new smart structures and effects, the all-Si approach has demonstrated potentialities leading to performances close to those of the well-established germanium (Ge) technology. Moreover, the possibility to integrate new emerging 3D and 2D materials with Si, together with the capability of manufacturing devices at the nanometric scale, has led to the development of new devices with unexpected performance.
机译:硅(Si)技术提供了一种优异的平台,用于单片整合在同一基板中的光子[1]和微电子[2]功能。在过去的几年中,已经报道了各种被动和有源SI光子和光电器件,特别是在光检测领域[3,4,5],其中提出了新的效果和结构。可见波长的Si光电探测器(PDS)是商业现实,但不幸的是,由于1100nm的Si透明度,它们不能在红外线(IR)范围内。从历史上看,在Si上生长的锗(GE)的使用已经允许实现高达1550nm的Si基Pds [6]。近年来,通过将SI PDS的运作扩展到红外制度,最近,由于对新的智能结构和效果的调查来实现了令人印象深刻的进展,并且所有SI方法都表现出潜在的潜在能力靠近那些良好的锗(GE)技术。此外,可以将新的3D和2D材料与Si集成在一起,以及纳米级的制造装置的能力导致了具有意外性性能的新设备的开发。

著录项

  • 期刊名称 Micromachines
  • 作者

    Maurizio Casalino;

  • 作者单位
  • 年(卷),期 2020(11),11
  • 年度 2020
  • 页码 1010
  • 总页数 4
  • 原文格式 PDF
  • 正文语种
  • 中图分类
  • 关键词

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