The Activation of Ti-Zr-V-Hf Non-Evaporable Getter Films with Open-Cell Copper Metal Foam Substrates

摘要

Secondary electron emission (SEE) inhibition and vacuum instability are two important issues in accelerators that may induce multiple effects in accelerators, such as power loss and beam lifetime reduction. In order to mitigate SEE and maintain high vacuum simultaneously, open-cell copper metal foam (OCMF) substrates with Ti-Zr-V-Hf non-evaporable getter (NEG) coatings are first proposed, and the properties of surface morphology, surface chemistry and secondary electron yield (SEY) were analyzed for the first time. According to the experimental results tested at 25 °C, the maximum SEY (δmax) of OCMF before and after Ti-Zr-V-Hf NEG film deposition were 1.25 and 1.22, respectively. The XPS spectra indicated chemical state changes of the metal elements (Ti, Zr, V and Hf) of the Ti-Zr-V-Hf NEG films after heating, suggesting that the NEG films can be activated after heating and used as getter pumps.