Flexible and Highly Sensitive Strain Sensor Based on Laser-Induced Graphene Pattern Fabricated by 355 nm Pulsed Laser

摘要

A laser-induced-graphene (LIG) pattern fabricated using a 355 nm pulsed laser was applied to a strain sensor. Structural analysis and functional evaluation of the LIG strain sensor were performed by Raman spectroscopy, scanning electron microscopy (SEM) imaging, and electrical–mechanical coupled testing. The electrical characteristics of the sensor with respect to laser fluence and focal length were evaluated. The sensor responded sensitively to small deformations, had a high gauge factor of ~160, and underwent mechanical fracture at 30% tensile strain. In addition, we have applied the LIG sensor, which has high sensitivity, a simple manufacturing process, and good durability, to human finger motion monitoring.