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3D Super-Resolution Optical Profiling Using Microsphere Enhanced Mirau Interferometry

机译:使用微球增强型Mirau干涉术的3D超分辨率光学轮廓分析

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摘要

We present quantitative three dimensional images of grooves on a writable Blu-ray Disc based on a single objective Mirau type interferometric microscope, enhanced with a microsphere which is considered as a photonic nanojet source. Along the optical axis the resolution of this microsphere assisted interferometry system is a few nanometers while the lateral resolution is around 112 nm. To understand the physical phenomena involved in this kind of imaging we have modelled the interaction between the photonic jet and the complex disc surface. Agreement between simulation and experimental results is demonstrated. We underline that although the ability of the microsphere to generate a photonic nanojet does not alone explain the resolution of the interferometer, the nanojet can be used to try to understand the imaging process. To partly explain the lateral super-resolution, the potential role of coherence is illustrated. The presented modality may have a large impact on many fields from bio-medicine to nanotechnology.
机译:我们提出了基于单目标Mirau型干涉显微镜的可写蓝光光盘上的凹槽的定量三维图像,并增强了被认为是光子纳米射流源的微球体。沿光轴,该微球辅助干涉测量系统的分辨率为几纳米,而横向分辨率约为112 nm。为了理解这种成像中涉及的物理现象,我们对光子射流与复杂盘表面之间的相互作用进行了建模。证明了仿真与实验结果之间的一致性。我们强调,尽管微球产生光子纳米射流的能力并不能单独解释干涉仪的分辨率,但是纳米射流可用于尝试理解成像过程。为了部分解释横向超分辨率,说明了相干的潜在作用。提出的模式可能会对从生物医学到纳米技术的许多领域产生重大影响。

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