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Rapid Fabrication of Graphene Field-Effect Transistors with Liquid-metal Interconnects and Electrolytic Gate Dielectric Made of Honey

机译:利用液态金属互连和蜂蜜制成的电解栅极介电层快速制造石墨烯场效应晶体管

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摘要

Historically, graphene-based transistor fabrication has been time-consuming due to the high demand for carefully controlled Raman spectroscopy, physical vapor deposition, and lift-off processes. For the first time in a three-terminal graphene field-effect transistor embodiment, we introduce a rapid fabrication technique that implements non-toxic eutectic liquid-metal Galinstan interconnects and an electrolytic gate dielectric comprised of honey. The goal is to minimize cost and turnaround time between fabrication runs; thereby, allowing researchers to focus on the characterization of graphene phenomena that drives innovation rather than a lengthy device fabrication process that hinders it. We demonstrate characteristic Dirac peaks for a single-gate graphene field-effect transistor embodiment that exhibits hole and electron mobilities of 213 ± 15 and 166 ± 5 cm 2/V·s respectively. We discuss how our methods can be used for the rapid determination of graphene quality and can complement Raman Spectroscopy techniques. Lastly, we explore a PN junction embodiment which further validates that our fabrication techniques can rapidly adapt to alternative device architectures and greatly broaden the research applicability.
机译:从历史上看,由于对精心控制的拉曼光谱,物理气相沉积和剥离工艺的大量需求,基于石墨烯的晶体管制造一直很耗时。在三端石墨烯场效应晶体管的实施例中,我们首次引入了一种快速制造技术,该技术可实现无毒的共晶液-金属Galinstan互连以及由蜂蜜组成的电解栅电介质。目标是最大程度地减少制造周期之间的成本和周转时间;因此,研究人员可以将注意力集中在驱动创新的石墨烯现象的表征上,而不是阻碍创新的冗长的器件制造过程。我们证明了单栅石墨烯场效应晶体管实施例的特征狄拉克峰,其表现出的空穴和电子迁移率分别为213±15和166±5 cm 2 / V·s。我们讨论了如何将我们的方法用于石墨烯质量的快速测定,以及如何补充拉曼光谱技术。最后,我们探索了PN结的实施例,该实施例进一步验证了我们的制造技术可以快速适应替代的器件架构,并大大拓宽了研究的适用性。

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