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Uncertainties in Small-Angle Measurement Systems Used to Calibrate Angle Artifacts

机译:用于校准角度伪像的小角度测量系统的不确定性

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摘要

We have studied a number of effects that can give rise to errors in small-angle measurement systems when they are used to calibrate artifacts such as optical polygons. Of these sources of uncertainty, the most difficult to quantify are errors associated with the measurement of imperfect, non-flat faces of the artifact, causing the instrument to misinterpret the average orientation of the surface. In an attempt to shed some light on these errors, we have compared autocollimator measurements to angle measurements made with a Fizeau phase-shifting interferometer. These two instruments have very different operating principles and implement different definitions of the orientation of a surface, but (surprisingly) we have not yet seen any clear differences between results obtained with the autocollimator and with the interferometer. The interferometer is in some respects an attractive alternative to an autocollimator for small-angle measurement; it implements an unambiguous and robust definition of surface orientation in terms of the tilt of a best-fit plane, and it is easier to quantify likely errors of the interferometer measurements than to evaluate autocollimator uncertainty.
机译:我们已经研究了许多效应,当这些效应用于校准诸如光学多边形之类的伪影时,会在小角度测量系统中引起误差。在这些不确定性来源中,最难以量化的是与工件不完美,不平整的面的测量相关的误差,从而导致仪器误解了表面的平均方向。为了揭示这些误差,我们将自准直仪的测量结果与Fizeau相移干涉仪进行的角度测量结果进行了比较。这两种仪器具有非常不同的工作原理,并且对表面的取向执行不同的定义,但是(令人惊讶的是)我们还没有看到用自动准直仪和干涉仪获得的结果之间有任何明显的区别。在某些方面,干涉仪是用于小角度测量的自动准直仪的有吸引力的替代产品。它根据最佳拟合平面的倾斜度实现了对表面方向的明确而可靠的定义,并且比评估自准直仪的不确定性更容易量化干涉仪测量的可能误差。

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