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Downsizing feature of microphase-separated structures via intramolecular crosslinking of block copolymers

机译:通过嵌段共聚物的分子内交联来减小微相分离结构的尺寸

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摘要

A novel strategy for downsizing the feature of microphase-separated structures was developed via the intramolecular crosslinking reaction of block copolymers (BCPs) without changing the molecular weight. A series of BCPs consisting of poly[styrene-st-(p-3-butenyl styrene)] and poly(rac-lactide) (SBS–LA) was subjected to Ru-catalyzed olefin metathesis under highly diluted conditions to produce intramolecularly crosslinked BCPs (SBS(cl)–LAs). Small-angle X-ray scattering measurement and transmission electron microscopy observation of the SBS(cl)–LAs revealed feature size reduction in lamellar (LAM) and hexagonally close-packed cylinder (HEX) structures in the bulk state, which was surely due to the restricted chain dimensions of the intramolecularly crosslinked SBS block. Notably, the degree of size reduction was controllable by varying the crosslink density, with a maximum decrease of 22% in the LAM spacing. In addition, we successfully observed the downsizing of the HEX structure in the thin film state using atomic force microscopy, indicating the applicability of the present methodology to next-generation lithography technology.
机译:通过嵌段共聚物(BCP)的分子内交联反应,在不改变分子量的情况下,开发了一种缩小微相分离结构特征的新策略。在高度稀释的条件下,将一系列由聚[苯乙烯-st-(对-3-丁烯基苯乙烯)]和聚(乳酸-丙交酯)(SBS-LA)组成的BCP进行Ru催化的烯烃复分解反应,以生产分子内交联的BCP。 (SBS(cl)–LAs)。 SBS(cl)–LAs的小角X射线散射测量和透射电子显微镜观察表明,在整体状态下,层状(LAM)和六角密堆积圆柱(HEX)结构的特征尺寸减小了,这肯定是由于分子内交联的SBS嵌段的限制性链尺寸。值得注意的是,尺寸的减小程度可通过改变交联密度来控制,其中LAM间距最大减小了22%。此外,我们使用原子力显微镜成功地观察了薄膜状态下HEX结构的缩小,表明本方法论适用于下一代光刻技术。

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