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Compact on-Chip Temperature Sensors Based on Dielectric-Loaded Plasmonic Waveguide-Ring Resonators

机译:基于电介质加载的等离子波导环谐振器的紧凑型片上温度传感器

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摘要

The application of a waveguide-ring resonator based on dielectric-loaded surface plasmon-polariton waveguides as a temperature sensor is demonstrated in this paper and the influence of temperature change to the transmission through the waveguide-ring resonator system is comprehensively analyzed. The results show that the roundtrip phase change in the ring resonator due to the temperature change is the major reason for the transmission variation. The performance of the temperature sensor is also discussed and it is shown that for a waveguide-ring resonator with the resonator radius around 5 μm and waveguide-ring gap of 500 nm which gives a footprint around 140 μm2, the temperature sensitivity at the order of 10−2 K can be achieved with the input power of 100 μW within the measurement sensitivity limit of a practical optical detector.
机译:本文阐述了基于加载介质的表面等离子体激元-极化子波导的波导环谐振器作为温度传感器的应用,并综合分析了温度变化对通过波导环谐振器系统传输的影响。结果表明,温度变化引起的环形谐振器往返相位变化是传输变化的主要原因。还讨论了温度传感器的性能,结果表明,对于谐振器半径约为5μm,波导环间隙为500 nm的波导环谐振器,其足迹约为140μm 2 ,在实际光学检测器的测量灵敏度极限内,输入功率为100μW时,可以实现10 −2 K量级的温度灵敏度。

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