In this paper, we present a membrane peristaltic micro pump driven by a rotating motor with magnetically attracted steel balls for lab-on-a-chip applications. The fabrication process is based on standard soft lithography technology and bonding of a PDMS layer with a PMMA substrate. A linear flow rate range ∼490 μL/min was obtained by simply varying the rotation speed of a DC motor, and a maximum back pressure of 592 Pa was achieved at a rotation speed of 43 rpm. The flow rate of the pump can also be adjusted by using steel balls with different diameters or changing the number of balls. Nevertheless, the micro pump can also work in high speed mode. A high back pressure up to 10 kPa was achieved at 500 rpm using a high speed DC motor, and an utmost flow rate up to 5 mL/min was reached.
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机译：在本文中，我们介绍了一种膜片蠕动微泵，该泵由旋转电机驱动，带有磁吸钢球，用于芯片实验室应用。制造过程基于标准的软光刻技术以及PDMS层与PMMA基板的粘合。只需改变直流电动机的转速即可获得约490μL/ min的线性流量范围，并且在43 rpm的转速下可获得592 Pa的最大背压。也可以通过使用不同直径的钢球或更改球数来调节泵的流量。尽管如此，微型泵也可以在高速模式下工作。使用高速直流电动机以500 rpm的转速实现了高达10 kPa的高背压，并且达到了最高5 mL / min的流速。
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